A system and method is disclosed for using a differential wet etch stop
technique to provide a uniform oxide layer over a metal layer in a laser
trimmed fuse. A layer of boron doped oxide with a slow etch rate is
placed over the metal layer. A layer of phosphorus doped oxide with a
fast etch rate is placed over the boron doped oxide. The time period
required for a wet etch process to etch through the phosphorus doped
oxide is calculated. The wet etch process is then applied to the
phosphorus doped oxide for the calculated time period. The wet etch
process slows significantly when it reaches the boron doped oxide. This
method forms a uniform layer of boron doped oxide over the metal layer.