A sample inspection system has line sensors that generate sample picture
data for layers of a sample disposed at different depths of the sample.
The line sensors are arranged parallel to each other and displaced from
each other in a vertical direction relative to the sample. A lens system
focuses the layers of the sample at the different sample depths on the
respective line sensors so that pictures of the layers at the different
sample depths are read as line picture data by the line sensors. The
sample inspection system includes an apparatus that stores the generated
sample picture data, allows a planar region of the sample to be
designated by a user for display, extracts picture data corresponding to
the designated planar region for each of the sample layers from the
sample picture data in response to designation of the planar region, and
stores the extracted picture data as a set. An image processing apparatus
displays on a display pictures corresponding to the extracted picture
data of the respective layers by one of selectively displaying each
picture individually in an alternating manner and simultaneously
displaying two or more of the pictures together in a parallel or
superposed manner.