To provide a laser processing apparatus which can converge a laser beam
for processing an object to be processed at a position as close as
possible to a predetermined position.This laser processing apparatus is
one for irradiating an object to be processed with a processing laser
beam while positioning a converging point within the object so as to form
a modified region caused by multiphoton absorption within the object
along a line along which, the object should be cut in the object, and
comprises an objective lens unit 5 including a processing objective lens
42 which converges the processing laser beam and a rangefinding laser
beam for measuring a displacement of a main surface of the object on an
identical axis, a light-receiving part 45 which receives a reflected
light beam of the rangefinding laser beam on the main surface, and an
actuator 43 which holds the processing objective lens 42 according to the
received reflected light beam such that the lens 42 is capable of freely
advancing and retracting with respect to the main surface; and a housing
21 to which a laser unit for emitting the processing laser beam is
attached. The objective lens unit 5 is detachably attached to the housing
21.