A charge balance semiconductor power device comprises an active area
having strips of p pillars and strips of n pillars arranged in an
alternating manner, the strips of p and n pillars extending along a
length of the active area. A non-active perimeter region surrounds the
active area, and includes at least one p ring surrounding the active
area. One end of at last one of the strips of p pillars extending
immediately adjacent an edge of the active area terminates at a
substantially straight line at which one end of each of the remainder of
the strips of p pillars also end. The straight line extends perpendicular
to the length of the active area along which the strips of n and p
pillars extend.