It is an object of the invention to provide a polishing pad capable of
high precision optical detection of an endpoint during polishing in
progress and prevention of slurry leakage from between a polishing region
and a light-transmitting region during the use thereof even after the
polishing pad has been used for a long period. It is a second object of
the invention to provide a polishing pad capable of suppression of
deterioration of polishing characteristics (such as in-plane uniformity)
and generation of scratches due to a difference in behavior of a
polishing region and a light-transmitting region during polishing. It is
a third object of the invention to provide a polishing pad having a
polishing region and a light-transmitting region with a concentration of
a specific metal equal to or lower than a specific value (threshold
value).