The present invention discloses a method of manufacturing a super large
wide-angle super high-speed response LCD apparatus by using a
photolithographic process for three times. The invention adopts a
halftone exposure technology and a nitrogen ion doped technology to form
a gate electrode, a common electrode, a pixel electrode and a contact
pad, and then uses the halftone exposure technology to form a silicon
(Si) island and a contact hole, and a general exposure technology to form
a source electrode, a drain electrode and an alignment control electrode.
A P-CVD apparatus is provided for forming a passivation layer into a film
by using a masking deposition method, or an ink-jet coating method is
used to coat a protective layer at a partial area, and a
photolithographic process is performed for three times to manufacture a
TFT matrix substrate of the super large wide-angle super high-speed
response LCD.