In one aspect the invention provides a gas field ion microscope that
includes an ion source in connection with an optical column, such that an
ion beam generated at the ion source travels through the optical column
and impinges on a sample. The ion source includes an emitter having a
width that tapers to a tip comprising a few atoms. In other aspects, the
invention provides methods for using the ion microscope to analyze
samples and enhancing the performance of a gas field ion source.