Disclosed is a method and system for modeling statistical leakage current distribution using logarithmic skew-normal distribution by generating statistical data with a statistical analysis method based on Monte-Carlo simulations or based on a pre-characterization response modeling step for a plurality of representative chip-unit models, deriving a plurality of parameters from said statistical data based on a specific class of statistical distributions, scaling said parameters to values used on realistic chip level, and generating leakage-current variation estimates based on said parameters.