A plasma accelerating apparatus and a plasma processing system having the
same are provided. The apparatus includes a channel comprising an inner
wall, an outer wall spaced apart from the inner wall by a distance for
encircling the inner wall, and an end wall connected to an end of the
inner wall and the outer wall to form an outlet port at the other ends of
the walls; a gas supply portion to supply a gas to an inside of the
channel; and a plasma generating and accelerating portion to supply
ionization energy to the gas to generate a plasma beam and to accelerate
the generated plasma beam toward the outlet port, wherein a coating layer
comprising a first layer composed of a carbon nano tube is formed on at
least one of the inner wall, the outer wall, and the end wall of the
channel.