Aspects comprise sputtering targets comprising a base material carrier
provided with a recessed pattern, such as a looping trench, to receive a
more precious material to be sputtered during deposition processes. The
looping trench can have a cross-section of varying depth based on an
expected variation in the magnetic field. The more precious material is
provided at least in the trench, for example by hot pressing, and also
can be pressed into a layer across an entirety of a surface of the
carrier. During operation, the desired deposition of the precious
material can occur from the trench area. Thus, a higher percentage of the
precious material in the target is used, reducing inventory costs. The
base material can be selected based on characteristics of the more
precious material, and based on goals including reducing diffusion of
base material into precious material and galvanic reactions.