According to an exemplary embodiment, a bulk acoustic wave (BAW) resonator
includes a piezoelectric layer situated between upper and lower
electrodes, where each of the upper and lower electrodes are a high
density metal. The BAW resonator further includes a controlled thickness
region including a low density metal segment, where the low density metal
segment is situated adjacent to the piezoelectric layer, and where the
controlled thickness region has controlled electromechanical coupling.
The controlled thickness region can provide reduced electromechanical
coupling into lateral modes. The low density metal segment can extend
along the perimeter of the BAW resonator.