A method for conducting sub-lithography feature patterning of a device
structure is provided. First, a lithographically patterned mask layer
that contains one or more mask openings of a diameter d is formed by
lithography and etching over an upper surface of the device structure.
Next, a layer of a self-assembling block copolymer is applied over the
lithographically patterned mask layer and then annealed to form a single
unit polymer block of a diameter w inside each of the mask openings,
provided that w