The present invention relates to an aqueous coating composition for
coating a photoresist pattern comprising a polymer containing amino
group. The present invention also relates to a process for manufacturing
a microelectronic device comprising providing a substrate with a
photoresist pattern, coating the photoresist pattern with the novel
coating material reacting a portion of the coating material in contact
with the photoresist pattern, and removing a portion of the coating
material which is not reacted with a removal solution.