A robot with improved cleanliness for use in a clean environment is
disclosed, having a uniform flow through the open interface between the
clean environment and the interior of the robot housing, passing the
particle generation area to an exhaust port, keeping the particles from
the clean environment. The uniform flow reduces or eliminates the back
flow, and further allows the scalability of the open interface to prevent
particles generated from moving mechanisms within the robot housing to
contaminate the clean environment. The uniform flow can be established by
designing the flow dynamic, centering the exhaust port, or by restricting
the flow along the elongated slot, for example, by uniformly restricting
the flow along the elongated slot, or by implementing a restrictor along
the elongated slot.