A vibration-type cantilever holder holds a cantilever opposed to a sample.
The holder supports a main body part of the cantilever at only its base
end so that a probe at the free end of the cantilever can contact the
sample. The holder has a cantilever-attaching stand on which the main
body part is placed and fastened such that the cantilever is tilted at a
predetermined angle with respect to the sample. A first vibration source
is fastened to the cantilever-attaching stand and vibrates with a phase
and an amplitude depending on a predetermined waveform signal, and the
first vibration source is fastened at a first location to a holder main
body. A second vibration source is fastened at a second location, which
is spaced from the first location, to the holder main body and generates
vibrations to offset vibrations traveling from the first vibration source
to the cantilever-attaching stand and holder main body. The holder allows
the cantilever to vibrate according to the vibrational characteristics of
only the cantilever by counteracting additional vibrations.