A settling judgment method judges whether an object is settled at a target position by using a settlement judgment formula set a slice value and number of continuous samples. The slice and number of continuous judgments of the judgment value of the settling judgment are judged by the slice value and number of samples which are set such that the maximum value of a maximum amplitude ratio (Rate), for each frequency of cyclic disturbance (Y), determined from the maximum amplitude values (Max1, Max2) of the judgment values when the cyclic disturbance is applied is contained within a predetermined position accuracy. Settlings can be judged at high-speed and accurately according to the settling judgment formula, and both an improvement of positioning accuracy and high-speed judgment can be implemented.