Methods and apparatuses for selectively removing conductive materials from
a microelectronic substrate. A method in accordance with an embodiment of
the invention includes positioning the microelectronic substrate
proximate to and spaced apart from an electrode pair that includes a
first electrode and a second electrode spaced apart from the first
electrode. An electrolytic liquid can be directed through a first flow
passage to an interface region between the microelectronic substrate and
the electrode pair. A varying electrical signal can be passed through the
electrode pair and the electrolytic liquid to remove conductive material
from the microelectronic substrate. The electrolytic liquid can be
removed through a second flow passage proximate to the first flow passage
and the electrode pair.