A pore- or particle-size distribution measurement apparatus is provided.
When the size of a pore existing in a porous insulator film or the size
of a particle in a thin film is measured, a specimen having the insulator
film on the surface of a substrate is irradiated, from the surface side
thereof, with X-rays at a specified incident angle larger than the total
reflection critical angle of the insulator film but less than 1.3 times
the total reflection critical angle of the substrate. In the irradiated
X-rays, among components exiting from the insulator film without entering
the pore and scattering of reflection component of the X-rays reflected
on the surface of the substrate after having entered the insulator film,
the scattered component whose exit angle is larger than that of a
component of the reflection component which exits from the insulator film
without entering the pore is detected.