A process for manufacturing a thin-film transistor device includes forming
a dielectric insulation layer on a substrate, forming an amorphous
silicon layer on the dielectric insulation layer, crystallizing the
amorphous silicon layer, so as to obtain polycrystalline silicon, forming
gate structures on the polycrystalline silicon, and forming first doped
regions within the polycrystalline silicon laterally with respect to the
gate structures. The crystallizing step includes forming first capping
dielectric regions on the amorphous silicon layer, and then irradiating
the amorphous silicon layer using a laser so as to form active areas of
polycrystalline silicon separated by separation portions of amorphous
silicon underlying the first capping dielectric regions.