The present invention relates to a method and a device for
three-dimensionally determining the refractive index and, if necessary,
the layer thickness of transparent or partially transparent layers in
which the layer (1) is irradiated at different angles of incidence (5)
with polarised light, and variations in the polarisation of the light are
measured and evaluated as the light passes through the layer (1). The
method is characterized in that the measurement is carried out through an
immersion medium (3) between which the layer (1) is inserted. A highly
accurate determination of the refractive index of anisotropic thin layers
in all three spatial directions is made possible by this method.