One embodiment of the present invention provides a system that converts a
non-bandlimited pattern layout into a band-limited pattern image to
facilitate simulating an optical lithography process. During operation,
the system receives the non-bandlimited pattern layout which comprises
one or more polygons. The system further receives an anti-aliasing filter
(AAF) kernel, wherein the AAF kernel is configured to convert a
non-bandlimited pattern into a band-limited pattern. The system then
constructs an AAF lookup table for the AAF kernel, wherein the AAF lookup
table contains precomputed values for a set of convolution functions
which are obtained by convolving a set of basis functions with the AAF
kernel. Next, the system creates a sampled pattern layout by applying a
grid map over the pattern layout. The system then obtains the
band-limited pattern image by using the AAF lookup table to convolve the
AAF kernel with each grid location in the sampled pattern layout.