An exposure apparatus including a projection optical system for projecting
a pattern of a reticle onto a plate to be exposed, via a liquid that is
filled in a space between the projection optical system and the plate, a
supply pipe for supplying the liquid to the space between a final surface
in the projection optical system and the plate, a recovery pipe for
recovering the liquid from the space between the final surface in the
projection optical system and the plate, and a measuring apparatus for
measuring a refractive index of the liquid. The measuring apparatus
includes (i) a cell for accommodating the liquid and transmitting light,
wherein the cell is connected to one of the supply pipe and the recovery
pipe, and (ii) a detector for detecting an incident position of the light
refracted by the liquid in the cell.