This invention relates to organoaluminum precursor compounds represented by the formula: ##STR00001## wherein R.sub.1, R.sub.2, R.sub.3 and R.sub.4 are the same or different and each represents hydrogen or an alkyl group having from 1 to about 3 carbon atoms, and R.sub.5 represents an alkyl group having from 1 to about 3 carbon atoms. This invention also relates to processes for producing the organoaluminum precursor compounds and a method for producing a film or coating from the organoaluminum precursor compounds.