A displacement detection mechanism for a scanning probe microscope capable
of performing measurement quickly with high precision even if an
objective lens or an illumination system is arranged above or below a
sample or a cantilever, and a scanning probe microscope comprising it.
The displacement detection mechanism (112) for a scanning probe
microscope comprising a supporting section (22) for supporting a
cantilever (20), a light source (114) for irradiating a reflective
surface (14) with light, and a light receiving section (121) for
receiving light reflected off the reflective surface (14), and detecting
displacement of the cantilever (20) based on the light receiving position
of the light receiving section (121), wherein the rear end of the
cantilever (20) is secured to the supporting section (22), and the above
light is allowed to impinge on the reflective surface (14), while
inclining toward the X axis and Y axis, from above regions B and C on the
distal end side of the cantilever (20) out of regions A, B, C and D
sectioned, when viewed from the above, by the Y axis extending in the
longitudinal direction of the cantilever (20) and the X axis passing
through the reflective surface (14) and extending in the direction
intersecting the Y axis perpendicularly.