A select gate structure for a non-volatile storage system includes a
select gate and a coupling electrode which are independently drivable.
The coupling electrode is adjacent to a word line in a NAND string and
has a voltage applied which reduces gate induced drain lowering (GIDL)
program disturb of an adjacent unselected non-volatile storage element.
In particular, an elevated voltage can be applied to the coupling
electrode when the adjacent word line is used for programming. A reduced
voltage is applied when a non-adjacent word line is used for programming.
The voltage can also be set based on other programming criterion. The
select gate is provided by a first conductive region while the coupling
electrode is provided by a second conductive region formed over, and
isolated from, the first conductive region.