There is provided a floating gate transistor, such as an EEPROM
transistor, and method of making the transistor using two masking steps.
The method of making a transistor includes patterning a floating gate
layer using a first photoresist mask to form a floating gate rail and
doping an active area using the floating gate rail as a mask to form
source and drain regions in the active area. The method also includes
patterning a control gate layer, a control gate dielectric layer, the
floating gate rail, a tunnel dielectric layer and the active area using a
second photoresist mask to form a control gate, a control gate
dielectric, a floating gate, a tunnel dielectric and a channel island
region.