A method for decomposing a target pattern containing features to be
printed on a wafer into multiple patterns. The method includes the steps
of: (a) determining a minimum critical dimension and pitch associated
with a process to be utilized to image the multiple patterns; (b)
generating an anchoring feature; (c) disposing the anchoring feature
adjacent a first feature of the target pattern; (d) growing the anchoring
feature a predetermined amount so as to define a first area; (e)
assigning any feature within the first area to a first pattern; (f)
disposing the anchoring feature adjacent a second feature of the target
pattern; (g) growing the anchoring feature the predetermined amount so as
to define a second area; and (h) assigning any feature within the second
area to a second pattern. Steps (c)-(h) are then repeated until the
densely spaced features within the target pattern have been assigned to
either the first or second pattern.