There is disclosed is a liquid immersion optical tool, which comprises a
light source, an optical lens system, a stage which moves an object base
on which an object is to be placed, a head comprising a liquid immersion
medium fluid supply device and a liquid immersion medium fluid discharge
device to provide a layer of liquid immersion medium fluid between the
optical lens system and the object, a fence which limits a region of the
layer of liquid immersion medium fluid, and a cleaning device which
cleans a portion having been contacted with the liquid immersion medium
fluid by means of a cleaning solution.