A retrograde well structure for a CMOS imager that improves the quantum
efficiency and signal-to-noise ratio of the imager. The retrograde well
comprises a doped region with a vertically graded dopant concentration
that is lowest at the substrate surface, and highest at the bottom of the
well. A single retrograde well may have a single pixel sensor cell,
multiple pixel sensor cells, or even an entire array of pixel sensor
cells formed therein. The highly concentrated region at the bottom of the
retrograde well repels signal carriers from the photosensor so that they
are not lost to the substrate, and prevents noise carriers from the
substrate from diffusing up into the photosensor. Also disclosed are
methods for forming the retrograde well.