A hydroxystyrene/indene/alkoxyisobutoxystyrene copolymer having Mw of
1,000-500,000 is formulated as a base resin to give a resist composition,
typically chemically amplified positive resist composition. The
composition exhibits a high resolution, a satisfactory resist pattern
profile after development, and improved etch resistance and is thus
suitable as a micropatterning material for the fabrication of VLSI.