A baking apparatus including a hot plate and a substrate rotation member
is provided. The hot plate has a heating surface. The substrate rotation
member includes a rotation ring and a plurality of support arms. The
rotation ring is configured to surround the hot plate. The support arms
are disposed over the heating surface of the hot plate. Each of the
support arms includes a connection part and a support part, wherein the
connection part is configured to connect the rotation ring and the
support part, and a supporting surface of the support part for supporting
the substrate is higher than the heating surface of the hot plate.