A method for stripping a pellicle from an exposure master plate is
provided, the pellicle being a lithographic pellicle that includes a
pellicle frame, a pellicle film stretched over one end face of the
pellicle frame via a pellicle film adhesive, and an exposure master plate
pressure-sensitive adhesion layer provided on the other end face, the
method including a step of irradiating the pressure-sensitive adhesion
layer with UV light. There is also provided a stripping apparatus used in
the stripping method, the apparatus including a light source for
irradiating the exposure master plate pressure-sensitive adhesion layer
with UV light and means for heating the exposure master plate and/or the
pellicle frame with which the pressure-sensitive adhesion layer is in
contact.