Provided are an X-ray analysis apparatus and an X-ray analysis method, in
which a measurer can judge an area incapable of being analyzed in a
sample with a concave-convex portion. The X-ray analysis apparatus
includes: an X-ray tubular bulb for irradiating an arbitrary irradiation
point located on the sample with a radiation beam; an X-ray detector for
detecting a characteristic X-ray and a scattered X-ray radiated from the
sample and outputting a signal containing energy information on the
characteristic X-ray and the scattered X-ray; a narrow-range illumination
mechanism and a wide-range illumination mechanism for emitting an
illumination light to the sample to illuminate the sample; and a
narrow-range observation mechanism and a wide-range observation mechanism
for obtaining an illumination image of the sample, which is illuminated
with the illumination light, as image data, in which the narrow-range
observation mechanism and the wide-range observation mechanism include a
narrow-range oblique illumination section and a wide-range oblique
illumination section, respectively, in which an optical axis of the
illumination light at a time of the illuminating is set toward the
irradiation point in the same direction as a direction linking the
irradiation point with the X-ray detector at a time of the detecting.