Random access memory cells having a short phase change bridge structure
and methods of making the bridge structure via shadow deposition. The
short bridge structure reduces the heating efficiency needed to switch
the logic state of the memory cell. In one particular embodiment, the
memory cell has a first electrode and a second electrode with a gap
therebetween. The first electrode has an end at least partially
non-orthogonal to the substrate and the second electrode has an end at
least partially non-orthogonal to the substrate. A phase change material
bridge extends over at least a portion of the first electrode, over at
least a portion of the second electrode, and within the gap. An
insulative material encompasses at least a portion of the phase change
material bridge.