There is provided a reflective X-ray microscope for examining an object in
an object plane. The reflective X-ray microscope includes (a) a first
subsystem, having a first mirror and a second mirror, disposed in a beam
path from the object plane to the image plane, and (b) a second
subsystem, having a third mirror, situated downstream of the first
subsystem in the beam path. The object is illuminated with radiation
having a wavelength <100 nm, and the reflective X-ray microscope
projects the object with magnification into an image plane.