An iterative timing analysis is analytically performed before a chip is
fabricated, based on a methodology using optical proximity correction
techniques for shortening the gate lengths and adjusting metal line
widths and proximity distances of critical time sensitive devices. The
additional mask is used as a selective trim to form shortened gate
lengths or wider metal lines for the selected, predetermined transistors,
affecting the threshold voltages and the RC time constants of the
selected devices. Marker shapes identify a predetermined subgroup of
circuitry that constitutes the devices in the critical timing path. The
analysis methodology is repeated as often as needed to improve the timing
of the circuit with shortened designed gate lengths and modified RC
timing constants until manufacturing limits are reached. A mask is made
for the selected critical devices using OPC techniques.