Methods of reducing the floating body effect in vertical transistors are
disclosed. The floating body effect occurs when an active region in a
pillar is cut off from the substrate by a depletion region and the
accompanying electrostatic potential created. In a preferred embodiment,
a word line is recessed into the substrate to tie the upper active region
to the substrate. The resulting memory cells are preferably used in
dynamic random access memory (DRAM) devices.