A MEMS hysteretic thermal device may have two passive beam segments driven
by a current-carrying loop coupled to the surface of a substrate. The
first beam segment is configured to move in a direction having a
component perpendicular to the substrate surface, whereas the second beam
segment is configured to move in a direction having a component parallel
to the substrate surface. By providing this two-dimensional motion, a
single MEMS hysteretic thermal device may by used to close a switch
having at least one stationary contact affixed to the substrate surface.