A system and method are provided for analyzing layout patterns via
simulation using a lithography model to characterize the patterns and
generate rules to be used in rule-based optical proximity correction
(OPC). The system and method analyze a series of layout patterns
conforming to a set of design rules by simulation using a lithography
model to obtain a partition of the pattern spaces into one portion that
requires only rule-based OPC and another portion that requires
model-based OPC. A corresponding hybrid OPC system and method are also
introduced that utilize the generated rules to correct an integrated
circuit (IC) design layout which reduces the OPC output complexity and
improves turnaround time.