Disclosed is a diffractive micromirror and a method of producing the same.
More particularly, the present invention pertains to a diffractive
thin-film piezoelectric micromirror, which is operated in a piezoelectric
operation manner to assure excellent displacement, operation speed,
reliability, linearity, and low voltage operation, and a method of
producing the same. The diffractive thin-film piezoelectric micromirror
includes a silicon substrate on which a recess is formed to provide an
air space to the center thereof, and a piezoelectric mirror layer having
a band shape, which is attached to the silicon substrate along both ends
of the recess at both ends thereof while being spaced from the bottom of
the recess at a center portion thereof and which includes a thin-film
piezoelectric material layer to be vertically movable when voltage is
applied to the piezoelectric material layer, and thus diffracts an
incident light beam.