Microfeature workpiece substrates having through-substrate vias, and
associated methods of formation are disclosed. A method in accordance
with one embodiment for forming a support substrate for carrying
microfeature dies includes exposing a support substrate to an
electrolyte, with the support substrate having a first side with a first
conductive layer, a second side opposite the first side with a second
conductive layer, and a conductive path extending through the support
substrate from the first conductive layer to the second conductive layer.
The method can further include forming a bond pad at a bond site of the
first conductive layer by disposing at least one conductive bond pad
material at the bond site, wherein disposing the at least one conductive
bond pad material can include passing an electrical current between the
first and second conductive layers via the conductive path, while the
substrate is exposed to the electrolyte.