A supporting unit in a moving table device, easily connected to a base and
a table, is provided. A supporting unit (U.alpha.) has a pair of planar
bearing plates. Inside the planar bearing plates are positioned spherical
bearing plates, respectively. Further, a spherical axial member is
sandwiched between the spherical bearing plates (34a, 34b). A planar
bearing is formed between each of the planar bearing plates and each of
the spherical bearing plates. A spherical bearing is formed between each
of the spherical bearing plates and the spherical axial member. Thus, the
supporting unit (U.alpha.) is provided with a certain degree of
movability in five-axis directions. With the high degree of movability,
the supporting unit (U.alpha.) can be easily connected to a base and a
table.