A probe card which can help to enhance the productivity of semiconductor
integrated circuits manufacturing and to reduce the manufacturing cost
thereof, and a method of probe-testing semiconductor integrated circuits
by using the probe card. The probe card is designed to test semiconductor
integrated circuits formed on a semiconductor wafer and arranged in rows
and columns. It has groups of probe needles provided to contact
semiconductor integrated circuits arranged in two columns and at least
two rows. The card receives a test signal from a test device and supplies
the test signal simultaneously to these semiconductor integrated circuits
arranged in two columns and at least tow rows, through the groups of
probe needles. It receives response signals simultaneously from the
semiconductor integrated circuits through the groups of probe needles and
then supplies the response signals to the tester.