In one embodiment, an integrated circuit includes a PMOS transistor having
a gate stack comprising a P+ doped gate polysilicon layer and a nitrided
gate oxide (NGOX) layer. The NGOX layer may be over a silicon substrate.
The integrated circuit further includes an interconnect line formed over
the transistor. The interconnect line includes a hydrogen getter material
and may comprise a single material or stack of materials. The
interconnect line advantageously getters hydrogen (e.g., H.sub.2 or
H.sub.2O) that would otherwise be trapped in the NGOX layer/silicon
substrate interface, thereby improving the negative bias temperature
instability (NBTI) lifetime of the transistor.