Objects of the present invention are to provide a novel titanium complex that has good vaporization characteristics and an excellent thermal stability, and becomes a raw material for forming a titanium-containing thin film by methods such as CVD method or ALD method, its production method, a titanium-containing thin film formed using the same, and its formation method. In the invention, a titanium complex represented by the general formula (1) is produced by reacting a diimine represented by the general formula (2) and metallic lithium, and then reacting a tetrakisamide complex represented by the general formula (3). ##STR00001## (In the formulae, R.sup.1 and R.sup.4 represent an alkyl group having from 1 to 6 carbon atoms. R.sup.2 and R.sup.3 each independently represents a hydrogen atom or an alkyl group having from 1 to 3 carbon atoms. R.sup.5 and R.sup.6 each independently represents an alkyl group having from 1 to 4 carbon atoms.).