There is provided an anti-reflective coating forming composition for
lithography comprising a polymer having an ethylenedicarbonyl structure
and a solvent; an anti-reflective coating formed from the composition;
and a method for forming photoresist pattern by use of the composition.
The anti-reflective coating obtained from the composition can be used in
lithography process for manufacturing a semiconductor device, has a high
preventive effect for reflected light, causes no intermixing with
photoresists, and has a higher etching rate than photoresists.