A method for producing a thin film titanium dioxide is disclosed. The
disclosed method for producing the thin film titanium dioxide includes
performing a magnetron reactive sputtering process to vaporize at least
portions of a titanium source in a sputtering chamber that is supplied
with gaseous oxygen. The vaporized titanium reacts with the oxygen to
form anatase titanium dioxide, which is deposited on a substrate within
the sputtering chamber.