A film forming method comprising: supplying a reactive gas comprising a
compound including a metal atom between facing electrodes; arranging a
substrate between the electrodes; making the reactive gas in a plasma
state by applying a voltage between the electrodes under atmospheric
pressure or under a pressure in a vicinity of the atmospheric pressure
and discharging; and forming a metal film on a surface of the substrate
by supplying a reducing gas having a reducing property into a plasma
atmosphere in which the reactive gas in the plasma state exists.