A direct-write laser lithography system comprises a reel-to-reel feed
system in a vacuum chamber that presents the clear film-side of a
single-sided metal-clad tape to a laser for direct patterning of the
metal. The laser beam is swept laterally across the tape by rotating
mirrors, and is intense enough to ablate the metal but not so strong as
to destroy the tape substrate. In one instance, two specialized lasers
are used, one set to ablate large field areas, and the other tuned to
scribe fine features and lines. The ablated metal blows off in a downward
direction and is collected for recycling.