A method of monitoring uniformity of a wafer is provided. A wafer
parameter is selected. Manufacturing data is collected. The manufacturing
data includes measurements of the selected wafer parameter. An average
offset profile of the wafer parameter for a first and second wafer is
determined using the manufacturing data. The first and second wafer are
associated with a product type and were processed by a processing tool.
An offset profile for a third wafer is predicted for a wafer using the
average offset profile. The third wafer is associated with the product
type and was processed by the processing tool.